1. 株式会社ブイテックス(JP)
  2. VTEX Co., Ltd.(EN)
  3. Vacuum valve
  4. "Three ZERO" to meet the needs of the next generation

"Three ZERO" to meet the needs of the next generation

Particle ZeroTrue-L Motion Slit Valve
Electric True-L Motion Slit Valve
Particles are "zero" indefinitely !

  • The gate moves horizontally to seal the O-ring without giving unnecessary force.
  • Generation of particles from O-ring can be reduced !

Please contact us for details of particle data !

Conventional type

Conventional type

Sealing by slight rotation movemtnt of valve body

True-L motion

True-L motion

Sealing by horizontal movement of valve body

Conventional features

Since the center of rotation is located just below the seat surface, almost no twisting force is generated.

Conventional features

Vibration ZeroElectric True-L Motion Slit Valve

Vibration is almost "zero" !

  • Vibration can be reduced drastically by controling Open/Close operation electrotically.

Contact us for details of vibration data !

Start "Close"

Start "Close"

Close

Close

Full Close

Full Close

Immediately after Open

Immediately after Open

During Open

During Open

Full Open

Full Open

Conductance ZeroAPC Penduroll ValveMinimum conductance during pressure control is "zero" !

  • Rapid rise of pressure
  • Process gas does not leak to near the set pressure.
  • Save process gas
ポートを塞いだ状態

[In the condition that the valve body closes the port]

Process gas are exhausted

Oリングをシート面に押し付けた状態

[In the condition that valve o-ring slightly pressed against the seal surface]

Pressure increase rate is maximized at the conductance is "zero"

圧力安定

[Pressure is being stabilized]

Control the capacity of process gas

Chamber-simulator

Encoder signal

Pressure signal

 

 

  • Penduroll valve
  • APC controller

The effect can be confirmed in advance with a simulator!

Parameter

  • Goals
  • Chamber-volume
  • Disturbance factor (pressure fluctuation etc.)
  • Exhaust velocity
  • Pressure signal delay
  • Gas species, flow rate, and temperature

CONTACT

Vacuum Valve Inquiry

Mail

Inquiry from Web

Inquiry Form

Phone number

Inquiry by phone

(VTEX JAPAN)
+81-3-3765-4161

(VTEX AMERICA)
+1-408-432-7200

(VTEX KOREA)
+82-31-686-5381

(VTEX CHINA)
+86-(0)21-6295-0800

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