"Three ZERO" to meet the needs of the next generation
Particle ZeroTrue-L Motion Slit Valve
Electric True-L Motion Slit ValveParticles are "zero" indefinitely !
- The gate moves horizontally to seal the O-ring without giving unnecessary force.
- Generation of particles from O-ring can be reduced !
Please contact us for details of particle data !
Conventional type
Sealing by slight rotation movemtnt of valve body
True-L motion
Sealing by horizontal movement of valve body
Conventional features
Since the center of rotation is located just below the seat surface, almost no twisting force is generated.
Vibration ZeroElectric True-L Motion Slit Valve
Vibration is almost "zero" !
- Vibration can be reduced drastically by controling Open/Close operation electrotically.
Contact us for details of vibration data !
Start "Close"
Close
Full Close
Immediately after Open
During Open
Full Open
Conductance ZeroAPC Penduroll ValveMinimum conductance during pressure control is "zero" !
- Rapid rise of pressure
- Process gas does not leak to near the set pressure.
- Save process gas
[In the condition that the valve body closes the port]
Process gas are exhausted
[In the condition that valve o-ring slightly pressed against the seal surface]
Pressure increase rate is maximized at the conductance is "zero"
[Pressure is being stabilized]
Control the capacity of process gas
Encoder signal
Pressure signal
- Penduroll valve
- APC controller
The effect can be confirmed in advance with a simulator!
Parameter
- Goals
- Chamber-volume
- Disturbance factor (pressure fluctuation etc.)
- Exhaust velocity
- Pressure signal delay
- Gas species, flow rate, and temperature
