【Next Generation Slit Valve】

We began taking orders for New Generation Slit Valve to correspond to miniaturization and IoT.


Vacuum valve

Vacuum valve

Since the early days of the vacuum equipment,
we develop and manufacture vacuum valves.

Rupture Disk

Rupture Disk

We, VTEX Corporation, as the only
manufacturer of rupture disk in Japan since 1963,
We contribute to the safety of our customers' applications.


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  • LED

Used in a variety of industries and equipment

Products designed, developed and produced by us have received high praise from many customers, and are widely used not only in Japan but also in overseas unit and plants.


【SEMICON JAPAN 2023】Notice of exhibition
3 days from Wednesday, December 13th to Friday, December 15th, 2023
Semiconductor manufacturing in Tokyo Big Sight East Hall 6
We will be exhibiting next-generation vacuum valves for equipment.

Booth number: 6403

We look forward to seeing you there.
【SEMICON JAPAN 2022】 Thanks for coming
From Wednesday, December 14 to Friday, 16, 2022,
we exhibited the next-generation vacuum valve and a rupture disk at SEMICON JAPAN held at TOKYO BIG SITE.

Thank you very much for visiting our booth.
【SEMICON JAPAN 2022】Notice of exhibition
For three days from Wednesday, December 14 to Friday, December 16, 2022, at Tokyo BIGSITE East 4 halls,
We will exhibit next-generation vacuum valves for semiconductor manufacturing equipment.

Booth number: 4529

We sincerely look forward to your visits.

Sorry for the inconvenience,
Please register in advance from below.
SEMICON JAPAN 2022 visit registered
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