Penduroll valve
Compact round slit valve
Comply with ISO/JIS flange standards.
We have a lineup of three types to meet customer applications and processes.
Product lineup by application
IPV
FULL OPEN-FULL CLOSE
Corresponding size: 160A to 500A
3PV
It can be stopped at any intermediate position of the FULL OPEN-FULL CLOSE to adjust conductance.
Corresponding size: 160A to 500A
APC
Pressure control valve adjustable to conductance 0
Corresponding size: 160A to 350A
About the Penduroll Valve of VTEX
IPV, 3PV, APC-type (common)
- One action ensures operation.
- This is a compact and space-saving design because of its simple and minimal number of components.
- It is designed to be durable and maintenance-free up to 500,000 FullClose/FullOpen operations (200,000 APCs).
- The O-ring is the standard valve seal.Contributing to cost reductions.
- The valve body can be removed by removing one bolt.
APC-type features
Our exclusive controller offers full performance.
- The dedicated controller is equipped with a lane function to calculate the optimum parameters for the chamber-volume.
- Precise pressure control and position control are possible with high-speed control.
- Up to two pressure sensors can be connected.
- Zero conductance control is possible.
Main common specifications (standards)
| IPV | 3PV | APC | |
|---|---|---|---|
| Corresponding aperture | 160〜500A | 160〜500A | 160〜350A |
| He leak amount (in the case of FKM seal material) | Valve body: 1.3×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s]external (body): 4.0×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s] | Valve body: 1.3×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s]external (body): 4.0×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s] | Valve body: 1.3×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s]external (body): 4.0×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s] |
| Operating temperature | 90°C (drive: 60°C) | 90°C (drive: 60°C) | 90°C (drive: 60°C) |
| Operating pressure | 0.5MPa | 0.5MPa | - |
| Warranty period | 12 months | 12 months | 12 months |
| Valve life | Open/close: 500,000 times ※ 400A: 150,000 times ※ 500 A: 100,000 times (Option 300,000 times) |
Open/close: 500,000 times ※ 400A: 150,000 times ※ 500 A: 100,000 times (Option 300,000 times) |
Open/close: 500,000 times ※ 400A: 150,000 times ※ 500 A: 100,000 times (Option 300,000 times) |
Usage Example of Penduroll Valve
Install as an exhaust system valve between the vacuum chamber and the exhaust pump.
IPV: Used for the load lock chamber and the transfer chamber
3PV: Used for Process chambers to maintain constant conductances
APC: Used to maintain constant fluctuating pressures.
