1. 株式会社ブイテックス(JP)
  2. VTEX Co., Ltd.(EN)
  3. Vacuum valve
  4. Penduroll valve

Penduroll valve

Compact round slit valve

Comply with ISO/JIS flange standards.
We have a lineup of three types to meet customer applications and processes.

Product lineup by application

About the Penduroll Valve of VTEX

IPV, 3PV, APC-type (common)

  • One action ensures operation.
  • This is a compact and space-saving design because of its simple and minimal number of components.
  • It is designed to be durable and maintenance-free up to 500,000 FullClose/FullOpen operations (200,000 APCs).
  • The O-ring is the standard valve seal.Contributing to cost reductions.
  • The valve body can be removed by removing one bolt.

APC-type features

Our exclusive controller offers full performance.

  • The dedicated controller is equipped with a lane function to calculate the optimum parameters for the chamber-volume.
  • Precise pressure control and position control are possible with high-speed control.
  • Up to two pressure sensors can be connected.
  • Zero conductance control is possible.

Main common specifications (standards)

  IPV 3PV APC
Corresponding aperture 160〜500A 160〜500A 160〜350A
He leak amount (in the case of FKM seal material) Valve body: 1.3×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s]external (body): 4.0×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s] Valve body: 1.3×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s]external (body): 4.0×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s] Valve body: 1.3×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s]external (body): 4.0×10-{circumflex over ()}10[Pa·m{circumflex over ()}3/s]
Operating temperature 90°C (drive: 60°C) 90°C (drive: 60°C) 90°C (drive: 60°C)
Operating pressure 0.5MPa 0.5MPa -
Warranty period 12 months 12 months 12 months
Valve life Open/close: 500,000 times

※ 400A: 150,000 times

※ 500 A: 100,000 times

(Option 300,000 times)
Open/close: 500,000 times

※ 400A: 150,000 times

※ 500 A: 100,000 times

(Option 300,000 times)
Open/close: 500,000 times

※ 400A: 150,000 times

※ 500 A: 100,000 times

(Option 300,000 times)

Usage Example of Penduroll Valve

Install as an exhaust system valve between the vacuum chamber and the exhaust pump.

IPV: Used for the load lock chamber and the transfer chamber
3PV: Used for Process chambers to maintain constant conductances
APC: Used to maintain constant fluctuating pressures.

Examples of Penduroll Valve Use

CONTACT

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Inquiry by phone

(VTEX JAPAN)
+81-3-3765-4161

(VTEX AMERICA)
+1-408-432-7200

(VTEX KOREA)
+82-31-686-5381

(VTEX CHINA)
+86-(0)21-6295-0800

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