Specification list
Slit valve specifications list
| Item | Specification | Required items | |
|---|---|---|---|
| Port size | Vertical (mm) × Horizontal (mm) | ○ | |
| Working pressure | Pa〜 Pa | ||
| Shutoff capacity of the valve body | Door (atmosphere-vacuum) □ Pressure (vacuum-vacuum) □ Back pressure (vacuum-atmosphere) | ○ | |
| Allowable leak rate | Main body | □4.0×10^-11[Pa・m^3/s] (standard) □Others ( ) | |
| Valve body | □1.3×10^-10[Pa・m^3/s] (standard) □Others ( ) | ||
| Presence or absence of the main body | No □ with □ | ||
| Connection | No □ (normal) □ SEMI □ Others ( ) | ||
| Operating temperature | Valve body | 90°C (standard) □ 120°C □ 150°C □ etc. ( ) | |
| Drives | □60°C (standard) □90°C □120°C □Others ( ) | ||
| Fluid used | □ No corrosive □ corrosive | ○ | |
| Sealing Materials | Main body | Unspecified □ with specified □ Described if specified ( ) | |
| Valve body | Unspecified □ with specified □ Described if specified ( ) | ||
| Materials | Main body | Square SUS square aluminum square( ) | |
| Valve body | Square SUS square aluminum square( ) | ||
| Bellows | AM350 (normal) □ Others ( ) | ||
| Other | （ ） | ||
| Presence or absence of surface treatment | When there is no square (□) and there is a square (□) | ||
| Heating | Main body | Temperature shall be stated (°C) when there is no square. | |
| Valve body | Temperature shall be stated (°C) when there is no square. | ||
| Water cooling | Main body | No □ with □ | |
| Valve body | No □ with □ | ||
| Between planes | If there is no square, indicate the dimensions (mm). | ○ | |
| Opening/Closing time | When there is no square, the time is indicated (s). | ||
| Mounting posture | Driving section (standard) □ Driving section ceiling □ Driving section side | ||
| Operating pressure | 0. 5MPa (Normal) and "Other" values are indicated (Mpa). | ||
| Full-Close Hold Function | No □ with □ | ||
| Open/Close sensor | Exhibit "Type" in other cases (standard) square or "type" etc.( ) | ||
| Articles (supplement to the above items, special specifications) | |||
Penduroll Valve specifications list
| Item | Specification | Required items | |
|---|---|---|---|
| Port size | □160A □200A □250A □320A □350A □400A □500A □( ) | ○ | |
| Connection | JIS □ ISO □ Other( ) | ||
| Desired type | □IPV □3PV □APC | ○ | |
| For IPVs and 3PV Operating pressure |
Not □ (0. 5MPa, normal) □ when there is □ indicates the numerical value (Mpa) | ||
| For APC Controller voltage |
Not □ (DC24V, normal) □ Enter the numerical value if there is any (( )) | ||
| Shutoff capacity of the valve body | Back pressure (vacuum-atmosphere) (standard) □ Others ( ) | ||
| Allowable leak rate | Main body | □1.3×10^-10[Pa・m^3/s](in the case of standard sealing material FKM) □Others ( ) | |
| Valve body | □1.3×10^-10[Pa・m^3/s](in the case of standard sealing material FKM) □Others ( ) | ||
| Operating temperature | Main body | 90°C (standard) □ 120°C □ 150°C □ etc. ( ) | ○ |
| Valve body | □60°C (standard) □90°C □120°C □Others ( ) | ||
| Fluid used | The name of the fluid shall be stated as far as possible in the case of □No corrosive property □Corrosive property. | ||
| Sealing Materials | Main body | Unspecified (FKM standard) □ Described in the case of specified and specified ( )... | |
| Valve body | Unspecified (FKM standard) □ Described in the case of specified and specified ( )... | ||
| DMaterials | Main body | □Aluminum castings (standard) □Others( ) | |
| Valve body | □Aluminum (standard) □Others( ) | ||
| Presence or absence of surface treatment | When there is no square (□) and there is a square (□) | ||
| Hheating | Main body | Temperature shall be stated (°C) when there is no square. | |
| Valve body | Temperature shall be stated (°C) when there is no square. | ||
| Opening/Closing time | When there is no square, the time is indicated (s). | ||
| Mounting posture | Horizontal opening □ Vertical opening | ○ | |
| Open/Close sensor | Uncontactless Reed Switch (Standard) □ In other cases, type etc. ( ) | ||
| Articles (supplement to the above items, special specifications) | |||
