1. 株式会社ブイテックス(JP)
  2. VTEX Co., Ltd.(EN)
  3. Vacuum valve
  4. Specification list

Specification list

Slit valve specifications list

Item Specification Required items
Port size Vertical (mm) × Horizontal (mm)
Working pressure         Pa〜             Pa  
Shutoff capacity of the valve body Door (atmosphere-vacuum) □ Pressure (vacuum-vacuum) □ Back pressure (vacuum-atmosphere)
Allowable leak rate Main body Square 4.0 × 10-{circumflex over ()}11 [Pa·m{circumflex over ()}3/s] (standard)squareand others (     )  
Valve body Square 9.0 × 10-{circumflex over ()}9 [Pa·m{circumflex over ()}3/s] (standard)squareand others (     )  
Presence or absence of the main body No □ with □  
Connection No □ (normal) □ SEMI □ Others (     )  
Operating temperature Valve body 90°C (standard) □ 120°C □ 150°C □ etc. (     )  
Drives □60°C (standard) □90°C □120°C □and others (     )  
Fluid used □ No corrosive □ corrosive
Sealing Materials Main body Unspecified □ with specified □ Described if specified (     )  
Valve body Unspecified □ with specified □ Described if specified (     )  
Materials Main body Square SUS square aluminum square(     )  
Valve body Square SUS square aluminum square(     )  
Bellows AM350 (normal) □ and others (     )  
Other (                          )  
Presence or absence of surface treatment When there is no square (□) and there is a square (□)  
Heating Main body Temperature shall be stated (°C) when there is no square.  
Valve body Temperature shall be stated (°C) when there is no square.  
Water cooling Main body No □ with □  
Valve body No □ with □  
Between planes If there is no square, indicate the dimensions (mm).
Opening/Closing time When there is no square, the time is indicated (s).  
Mounting posture Driving section (standard) □ Driving section ceiling □ Driving section side  
Operating pressure 0. 5MPa (Normal) and "Other" values are indicated (Mpa).  
Full-Close Hold Function No □ with □  
Open/Close sensor Exhibit "Type" in other cases (standard) square or "type" etc.(     )  
Articles (supplement to the above items, special specifications)

Penduroll Valve specifications list

Item Specification Required items
Port size □160A □200A □250A □320A □350A □400A □500A □(      )
Connection JIS □ ISO □ Other(     )  
Desired type □IPV □3PV □APC
For IPVs and 3PV
Operating pressure
Not □ (0. 5MPa, normal) □ when there is □ indicates the numerical value (Mpa)  
For APC
Controller voltage
Not □ (DC24V, normal) □ Enter the numerical value if there is any ((     ))  
Shutoff capacity of the valve body Back pressure (vacuum-atmosphere) (standard) □ and others (     )  
Allowable leak rate Main body 4.0 × 10-{circumflex over ()}11 [Pa·m{circumflex over ()}3/s] (in the case of standard sealing material FKM)}  
Valve body □9.0 × 10-{circumflex over ()}9 [Pa·m{circumflex over ()}3/s] (in the case of standard sealing material FKM)□and others (     )  
Operating temperature Main body 90°C (standard) □ 120°C □ 150°C □ etc. (     )
Valve body □60°C (standard) □90°C □120°C □and others (     )  
Fluid used The name of the fluid shall be stated as far as possible in the case of □No corrosive property □Corrosive property.  
Sealing Materials Main body Unspecified (FKM standard) □ Described in the case of specified and specified (     )...  
Valve body Unspecified (FKM standard) □ Described in the case of specified and specified (     )...  
DMaterials Main body □Aluminum castings (standard)  □Other(     )  
Valve body □Aluminum (standard)  □Other(     )  
Presence or absence of surface treatment When there is no square (□) and there is a square (□)  
Hheating Main body Temperature shall be stated (°C) when there is no square.  
Valve body Temperature shall be stated (°C) when there is no square.  
Opening/Closing time When there is no square, the time is indicated (s).  
Mounting posture Horizontal opening □ Vertical opening
Open/Close sensor Uncontactless Reed Switch (Standard) □ In other cases, type etc. (     )  
Articles (supplement to the above items, special specifications)

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(VTEX JAPAN)
+81-3-3765-4161

(VTEX AMERICA)
+1-408-432-7200

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+82-31-686-5381

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+86-(0)21-6295-0800

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