Vacuum valve
Vacuum valves that support the development of industrial technology
Since the early days of vacuum equipment development, we have been consistently engaged in design, development, and production as a specialist manufacturer of high-performance valves, contributing to the development of the latest technologies in Japan and around the world.
What is a vacuum valve ?
We have a lineup of Slit valve and Penduroll valve.
Slit valve isolates the vacuum chamber from the atmosphere, and also isolate between the vacuum chamber and other vacuum chamber at the gateway of wafer (work piece).
Penduroll valve to be installed between the vacuum chamber and the exhaust pump.
From small to large sizes, our Vacuum valves can meet every requirement for all industries and equipment such as miniaturization, production improvement, reducing cost and shortening delivery lead-time etc.
Choose products
Rollcam Slit Valve
Twin Rollcam Slit Valve
True L Motion Slit Valve
Slit Valve T Motion
Small size Rollcam Slit Valve
R2R Valve
Isolation Penduroll Valve (IPV)
Three-position penduroll valve (3PV)
APC Penduroll Valve
Controller VZ-1000G VZ-2000G
Special valve
"Three ZERO" to meet the needs of the next generation
Three ZERO valves for next-generation semiconductors.
Particle ZeroTrue-L Motion Slit Valve
Electric True-L Motion Slit Valve"Zero" particle
Vibration ZeroElectric True-L Motion Slit Valve"Zero" vibration
Conductance ZeroAPC Penduroll ValveMinimum conductance during pressure control is "zero"!
Application expamles by industry
Semiconductor
LCD
SolarCell
OLED
Medical
Research & Development
LED
Quartz crystal device
HDD
Metallurgy
Physics & Chemistry
Space
Example of Utilization by equipment
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Vacuum evaporation
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Etching
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Ashing
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Sputtering
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PVD
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CVD
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Epitaxial film formation
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Ion implantation
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Annealing
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Glove box
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Vacuum furnace
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ALD
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Roll-to-Roll apparatus
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Space chamber
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Melting furnace
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Synchrotron radiation facility
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SEM
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Dry cleaning
