Vacuum valves that support the development of industrial technology
Since the early days of vacuum equipment development, we have been consistently engaged in design, development, and production as a specialist manufacturer of high-performance valves, contributing to the development of the latest technologies in Japan and around the world.
What is a vacuum valve ?
We have a lineup of Slit valve and Penduroll valve.
Slit valve isolates the vacuum chamber from the atmosphere, and also isolate between the vacuum chamber and other vacuum chamber at the gateway of wafer (work piece).
Penduroll valve to be installed between the vacuum chamber and the exhaust pump.
From small to large sizes, our Vacuum valves can meet every requirement for all industries and equipment such as miniaturization, production improvement, reducing cost and shortening delivery lead-time etc.
Three ZERO valves for next-generation semiconductors.
Particle ZeroTrue-L Motion Slit Valve
Electric True-L Motion Slit Valve"Zero" particle
Vibration ZeroElectric True-L Motion Slit Valve"Zero" vibration
Conductance ZeroAPC Penduroll ValveMinimum conductance during pressure control is "zero"!
- Research & Development
- Quartz crystal device
- Physics & Chemistry
Example of Utilization by equipment
Epitaxial film formation
Synchrotron radiation facility