1. 株式会社ブイテックス(JP)
  2. VTEX Co., Ltd.(EN)
  3. Vacuum valve

Vacuum valve

Vacuum valves that support the development of industrial technology

Since the early days of vacuum equipment development, we have been consistently engaged in design, development, and production as a specialist manufacturer of high-performance valves, contributing to the development of the latest technologies in Japan and around the world.

What is a vacuum valve ?

We have a lineup of Slit valve and Penduroll valve.
Slit valve isolates the vacuum chamber from the atmosphere, and also isolate between the vacuum chamber and other vacuum chamber at the gateway of wafer (work piece).
Penduroll valve to be installed between the vacuum chamber and the exhaust pump.
From small to large sizes, our Vacuum valves can meet every requirement for all industries and equipment such as miniaturization, production improvement, reducing cost and shortening delivery lead-time etc.

Choose products

Rollcam Slit Valve

Rollcam Slit Valve

Rollcam Slit Valve TwinRollcamSlitValve

Twin Rollcam Slit Valve

Rollcam Slit Valve TrueLMotionSlitValve

True L Motion Slit Valve

Rollcam Slit Valve NewSlitValveT-Motion

Slit Valve T Motion

Rollcam Slit Valve SmallSizeRollcamSlitValue

Small size Rollcam Slit Valve

Rollcam Slit Valve R2R Valve

R2R Valve

Isolation Penduroll Valve (IPV)

Isolation Penduroll Valve (IPV)

Three-position penduroll valve (3PV)

Three-position penduroll valve (3PV)

APC Penduroll Valve

APC Penduroll Valve

Rollcam Slit Valve Controller

Controller VZ-1000G VZ-2000G

Rollcam Slit Valve FlowControllValve

Flow Control Valve

Special valve

Special valve

"Three ZERO" to meet the needs of the next generation

Three ZERO valves for next-generation semiconductors.

Particle ZeroTrue-L Motion Slit Valve
Electric True-L Motion Slit Valve
"Zero" particle

Vibration ZeroElectric True-L Motion Slit Valve"Zero" vibration

Conductance ZeroAPC Penduroll ValveMinimum conductance during pressure control is "zero"!

Application expamles by industry

  • SemiconductorSemiconductor
  • LCDLCD
  • SolarCellSolarCell
  • OLEDOLED
  • MedicalMedical
  • Research & DevelopmentResearch & Development
  • LEDLED
  • Quartz crystal deviceQuartz crystal device
  • HDDHDD
  • MetallurgyMetallurgy
  • Physics & ChemistryPhysics & Chemistry
  • SpaceSpace

Example of Utilization by equipment

  • Vacuum evaporation
  • Etching
  • Ashing
  • Sputtering
  • PVD
  • CVD
  • Epitaxial film formation
  • Ion implantation
  • Annealing
  • Glove box
  • Vacuum furnace
  • ALD
  • Roll-to-Roll apparatus
  • Space chamber
  • Melting furnace
  • Synchrotron radiation facility
  • SEM
  • Dry cleaning

CONTACT

Vacuum Valve Inquiry

Mail

Inquiry from Web

Inquiry Form

Phone number

Inquiry by phone

(VTEX JAPAN)
+81-3-3765-4161

(VTEX AMERICA)
+1-408-432-7200

(VTEX KOREA)
+82-31-686-5381

(VTEX CHINA)
+86-(0)21-6295-0800

Copyright © V-TEX Corporation. All Rights Reserved.