FAQ
- Can I place orders for Special Spec Valves ?
- Is there any inventory for standard products ?
- How large is the correspondence size ?
- Which information should I provide when ordering new valves ?
- How long is the Warranty Period ?
- Are there any connections to the chamber ?
- What is the meaning of Positive pressure, Back pressure, and Same pressure ?
- How much is He-leak amount in the valve ?
- How long is the durability ?
- What is the operating temperature ?
- What is the valve opening/closing tolerance pressure ?
- Is it possible to keep the valve closed when air pressure is lost ?
- Can I place orders for Repairing/OH ?
- Is there a price list ?
- What is the support system for Overseas ?
- Can I request for dispatching your designers to our location ?
- Can I place orders from overseas ?
- How many deliveries have you made in the past ?
- Where is the production site ?
- Is it possible to order only parts ?
- How long is the standard delivery time ?
- Is it possible to modify and maintain the Valves manufactured by other companies ?
Q.
Can I place orders for Special Spec Valves ?
A.
We have many kinds of special spec Valves so please provide us the detailed infromation and we would like to discuss with you.
Q.
Is there any inventory for standard products ?
A.
Since custom-made products are the mainstream, there is no inventory of standard products.
Q.
How large is the correspondence size ?
A.
We have a record of manufacturing 200mm wafers to G11 size glass substrates and a circle of 550A.
Q.
Which information should I provide when ordering new valves ?
A.
Please provide us the opening size, operating pressure, operating gas and operating temperature.
For the details, please refer to the "Specifications List" page.
Q.
How long is the Warranty Period ?
A.
One year after delivery is the standard.
Q.
Are there any connections to the chamber ?
A.
It is possible to adapt to your connection, but we may suggest it in consideration of the deformation at the time of the vacuum, etc....
Q.
What is the meaning of Positive pressure, Back pressure, and Same pressure ?
A.
Positive pressure: Pressure is applied to the valve seal surface.
Back pressure: Pressure is applied in the direction of peeling off the valve seal surface.
Same pressure: Both sides of the valve are at the same pressure.
Q.
How much is He-leak amount in the valve ?
A.
Normally, the valve seal part is not more than 9×10{circumflex over ()}11 [Pa·m{circumflex over ()}3/s], and the body part is not more than 4.0×10{circumflex over ()}11 [Pa·m{circumflex over ()}3/s].
Q.
How long is the durability ?
A.
Standard operation life is 1 million cycles for the gate valves and slit valves with a large number of operations and 300,000 cycles for the Penduroll Valves.
Q.
What is the operating temperature ?
A.
Valve section: 90℃ and drive section: 60℃ as standard.At high temperatures, the valve section is 150℃ and the drive section is 120℃.
Q.
What is the valve opening/closing tolerance pressure ?
A.
The pressure difference between the valve seal face side and the opposite side at the time of valve opening and closing.
Q.
Is it possible to keep the valve closed when air pressure is lost ?
A.
The mechanical holding mechanism and the air circuit can be selected.
Q.
Can I place orders for Repairing/OH ?
A.
Yes. We can support repaireing/OH your products.
Please contact us or fill in the "Inquiry Form" from our website.
Q.
Is there a price list ?
A.
There is no price list due to the order-made products. We can provide you the estimate quotation if you provide us the specification information from inquiry page.
Q.
What is the support system for Overseas ?
A.
We have sales & service centers in the United States, China, and South Korea.
Q.
Can I request for dispatching your designers to our location ?
A.
Yes. We can dispatch our designers to your site to make arrangement about specifications.
Please contact us or fill in the "Inquiry Form"from our website.
Q.
Can I place orders from overseas ?
A.
Yes. Our overseas sales department take your orders and reply.
Q.
How many deliveries have you made in the past ?
A.
From the mid-90s to the present, we have achieved a number of achievements.
Q.
Where is the production site ?
A.
We have manufacturing plants in Japan (Hitachinaka City in Ibaraki) and Korea.
Q.
Is it possible to order only parts ?
A.
There might be a case that we cannot support your request due to the warranty problem of replacing parts.
Also, we may not be able to provide our products directly to end users because we usually be as the OEM vendor of equipment manufacturers.
If you have any questions, please contact us or fill in the "Inquiry Form" from our website.
Q.
How long is the standard delivery time ?
A.
Standard L/T is 60 to 75 days.
※ Please contact us if you would like to request shorter L/T.
Q.
Is it possible to modify and maintain the Valves manufactured by other companies ?
A.
It is difficult for us to support these requests because of the warranty problems.