Transfer Valves

TOPProductsVacuum ValvesTransfer Valves

Compact design with simple component structure

Our product portfolio spans sizes from 200 mm wafer processes to G10.5 display manufacturing. Custom sizes and formats are also available.
Leveraging extensive experience, V TEX can manufacture products from small-lot production to fully customized designs according to customer needs.

Product Lineup by Application

Our transfer valve products are classified into three types based on pressure conditions:

  • Atmospheric Door Valve
    Atmospheric Door Valve

    Receives atmospheric differential pressure towards close

  • Door Valve
    Door Valve

    Used under no differential pressure

  • Vacuum Slit Valve
    Vacuum Slit Valve

    Receives differential pressure towards open

About V TEX Transfer Valves

Size Format

Ranging from 200mm wafer to G10.5 glass substrate

Valve actuation types vary depending on specifications such as port size and pressure conditions.
Optimal actuation type will be proposed based on customer specifications.

Actuation Type
  • Rollcam
  • Twin Rollcam
  • True-L Motion
  • T-Motion
  • R2R Type (for Roll-to-Roll display processes)

Common Features

  • No metal-to-metal contact within vacuum exposed surfaces
  • Simple design with minimal components, enabling compact structure
  • Standard specification of 1 million operating cycles; high reliability and maintenance-free performance.
  • O-ring is used as the standard gate seal, helping to reduce overall costs.

Standard Specifications

Helium Leak Rate Body: ≤ 4.0 × 10⁻¹¹ Pa·m³/s Gate: ≤ 1.3 × 10⁻¹⁰ Pa·m³/s
Operating Temperature Body / Gate: 90°C Actuator: 60°C
Open / Close Time 1.0 – 3.0 seconds (measured at full closure)
Materials Body: Aluminum Gate: Aluminum Seal material: FKM Bellows: AM350
Operating Pressure 0.45 – 0.55 MPa
Service Life 1 million cycles

Transfer Valve Applications

  • Critical gateway for moving substrates

    Transfer valves are used as partitions between atmospheric and vacuum areas, or between vacuum areas, for substrate transportation.

    ▼ Examples of Transfer Valve Applications
    Atmospheric Door Valve: Between EFEM and load-lock chamber
    Door Valve: Between load-lock chamber and transfer chamber
    Vacuum Slit Valve: Between transfer chamber and process chamber

    Critical gateway for moving substrates