Penduroll Valve

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Compact Pendulum-type Gate Valve

Compliant with ISO and JIS flange standards
Three types are available per customer applications needs.

Product Lineup by Application

  • Isolation Valve
    Isolation Valve

    Control Position: Open/Close
    Size range: 150A – 550A

  • Three Position Valve
    Three Position Valve

    Control Position: Open/Custom Angle/Close
    Size range: 150A – 550A

  • Pressure Conrol Valve
    Pressure Conrol Valve

    Control Position: Pressure control
    Size range: 150A – 550A

About Penduroll Valves

Common Features
  • Single-action, reliable operation
  • Space efficient, minimal component design
  • 500k cycle lifetime (200k for pressure control) for standard specification
  • O-ring is used as the standard gate seal, helping to reduce overall costs.
  • Gate plate can be removed using a single bolt.
Pressure Control Features

Stable and reliable performance through specialized controller.

  • Equipped with learning function to identify optimal parameters according to individual chamber environment.
  • High-speed, precision pressure and position control.
  • Can utilize up to two manometers.
  • Able to reach zero conductance.

Common Standard Specifications

Isolation Valve Three Position Valve Pressure Control Valve
Available Size Range 150A〜550A 150A〜550A 150A〜350A
Helium Leak rate Gate: <1.3×10-^10[Pa・m^3/s]
Exterior (Body): <4.0×10-^10[Pa・m^3/s] 		Gate: <1.3×10-^10[Pa・m^3/s]
Exterior (Body): <4.0×10-^10[Pa・m^3/s] 		Gate: <1.3×10-^10[Pa・m^3/s]
Exterior (Body): <4.0×10-^10[Pa・m^3/s]
Operating Temperature 90℃（Actuator: 60℃） 90℃（Actuator: 60℃） 90℃（Actuator: 60℃）
Operating Pressure 0.5MPa 0.5MPa Motorized
Warranty Period 12 Months 12 Months 12 Months
Service Life Open/Close cycles: 500,000
*400A: 150,000 cycles
*500A: 100,000 cycles
*Service life can be extended to 300,000 cycles as an option. 		Open/Close cycles: 500,000
*400A: 150,000 cycles
*500A: 100,000 cycles
*Service life can be extended to 300,000 cycles as an option. 		Open/Close cycles: 200,000
*1M cycle service life for incomplete closure cycles

Applications of Penduroll Valves

  • Installed between vacuum chamber and exhaust pump.

    Isolation Valve is used for load-lock chambers and transfer chambers.
    Three Position Valve is used to maintain constant conductance in process chambers, while Pressure Control Valve is used to regulate conductance for desired recipe.

    Installed between vacuum chamber and exhaust pump.