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HV and UHV Gate Valves

Used for many types of apparatus such as etching system and deposition system using vacuum environment
Proven sales record for major tool/equipment companies.
 
"V TEX Gate Valves are used for various apparatus such as Deposition, CVD, Spatter, Etching and Ashing, for research and development, small lot production, and mass production"
V TEX has great deal of sales achievement for major equipment companies for SEMI equipment and other apparatus such as FPD, LCD, OLED, HDD, and solar panels.
 
Transfer Valves   Gate Valves and Pendulum Valves
Transfer Valves   Gate Valves and Pendulum Valves
Used between Chambers or between Atmosphere and Chambers, as Work (e.g. wafer and glass board) goes through opening (port) of the valves.   Used between Chamber and Vacuum Pump. Control Valves are also available.
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UHV valves and other special Valves
UHV valves and other special Valves
Estimation is available depending on requirement and specifications.
 
Used for Particle Beam Accelerator, Synchrotron, UHV Chambers and etc.
※Applied to Research institution and High-Technology facilities.
 
<Production Achievement>
・UHV Valves
All metal valves
All metal valves with RF Contact
 
・Unique Specification Valves
Fast Closing Valve (FCV)
Valves for Particle Radiation Therapy Tool and Electronic Monitors
etc.
 
 
Each application is highly specialized, and V TEX provides flexible expertize and provide high satisfaction to customers.
All V TEX valves are made-to-order products.
 
 

Configuration example for vacuum valves for SEMI and panel production equipment

V TEX Gate Valves are used for various apparatus such as Deposition, CVD, Spatter, Etching and Ashing, for research and development, small lot production, and mass production
Gate valves used for In-line and Cluster Chamber configuration are classified roughly into two categories as below:
 
"Exhaust Valves (Pendulum Valves) : Used between Chamber and Vacuum Pump. Control Valves are also available. "
 
"Transfer Valves : Used between Chambers or between Atmosphere and Chambers, as Work (e.g. wafer and glass board) goes through opening (port) of the valves."
 
Please refer to figure shown on the right. This is an useage example of the valves with the commonly used cluster chambers example.
 
Cluster Chamber Example
 
 
RFQ for HV and UHV Gate Valves  
 
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